A DLTS study on plasma-hydrogenated n-type high-resistivity magnetic Cz silicon

Authors: Huang, Y.L., Simoen, E., Claeys, C., Rafi, J.M. and Clauws, P.

Journal: JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS

Volume: 18

Issue: 7

Pages: 705-710

eISSN: 1573-482X

ISSN: 0957-4522

DOI: 10.1007/s10854-006-9092-5

Source: Web of Science (Lite)