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What Do We Know about Hydrogen-Induced Thermal Donors in Silicon?

Authors: Simoen, E., Huang, Y.L., Ma, Y., Lauwaert, J., Clauws, P., Rafi, J.M., Ulyashin, A. and Claeys, C.

Journal: JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Volume: 156

Issue: 6

Pages: H434-H442

eISSN: 1945-7111

ISSN: 0013-4651

DOI: 10.1149/1.3111039

Source: Web of Science (Lite)