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Impact of direct plasma hydrogenation on thermal donor formation in n-type CZ silicon

Authors: Rafí, J.M., Simoen, E., Claeys, C., Huang, Y.L., Ulyashin, A.G., Job, R., Versluys, J., Clauws, P., Lozano, M. and Campabadal, F.

Journal: JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Volume: 152

Issue: 1

Pages: G16-G24

eISSN: 1945-7111

ISSN: 0013-4651

DOI: 10.1149/1.1824039

Source: Web of Science (Lite)