Three-layer structure of hydrogenated Czochralski silicon

Authors: Ma, Y., Job, R., Huang, Y.L., Fahrner, W.R., Beaufort, M.F. and Barbot, J.F.

Journal: JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Volume: 151

Issue: 9

Pages: G627-G631

eISSN: 1945-7111

ISSN: 0013-4651

DOI: 10.1149/1.1781613

Source: Web of Science (Lite)